Kuki Imashini Zigenzura Isuku ya Semiconductor isaba ibishishwa bya Aluminium birwanya anti-static?

Muri sub-nanometero ya semiconductor ibihimbano (fabs), robot yigenga (AMRs) hamwe nintwaro za robo zikora igenzura rikomeye, ihererekanyabubasha rya podiyumu (gukora FOUP), hamwe ninshingano zo gukurikirana ibidukikije mumasomo ya ISO yo mucyiciro cya mbere kugeza mucyiciro cya 3. Kuri izi ntera zateye imbere ( 2nm - 5nm ), ndetse nicyabaye kimwe cyo gusohora amashanyarazi (ESD) cyangwa agace ka sub-micron yo mu kirere gashobora gusenya ibyiciro byose bya silicon wafer, bigatuma amamiriyoni y amadorari atakaza umusaruro.

Gukora neza hamwe nibikoresho bifite agaciro gakomeye bya Photolithography hamwe na sisitemu yo gukoresha wafer, robot isuku ya semiconductor isaba robine anti-static isize ibishishwa bya aluminiyumu ( 5000 hamwe 6000 nuruhererekane ruvanze hamwe na kode ya disipuline).

Amashanyarazi ya Triboelectric & Igisekuru cya ESD

Mugihe robo yubugenzuzi bwisuku igenda igorofa ya fab, guterana hagati yiziga, umuyaga wumuyaga, hamwe ningendo zifatika zitanga amashanyarazi akomeye:

Gusenyuka kwa Wafer Gate Dielectric: Amafaranga atagenzuwe na electrostatike yegeranijwe ku gishishwa cy’inyuma cya robo irashobora kwambukiranya icyuho cy’ikirere kugera kuri Front Opening Unified Pods (FOUPs) cyangwa ibyiciro bya wafer, bigatuma okiside yo mu irembo isenyuka muri tristoriste nziza ya nanometero.

Kwanduza Ibice Binyuze mu Gukurura Electrostatike (ESA): Imibiri ya robo yimashini ikora nka magnesi ya electrostatike, ikurura uduce duto duto two mu kirere (<0.1μm) ishobora kugwa kuri wafer ya silikoni yambaye ubusa mugihe cyo kugenzura.

Kugereranya: Igikoresho gisanzwe gisize irangi / Ibyuma na Anti-Static Coated Aluminium Shell

Ibikoresho by'isuku

Matrix iri hepfo igereranya ibikoresho bya robot isanzwe hamwe na anti-static isize aluminium shell kubice bya semiconductor fab ibidukikije:

Ibyingenzi Byumwuga Mubyiciro bya Semiconductor Isuku yo Kugenzura Imashini

Ibibazo

Ikibazo cya 1: Kuki bidashoboka ko robot igenzura isuku idashobora gukoresha aluminiyumu isanzwe idafite kode irwanya static?

Igisubizo: Anodizing isanzwe ikora aluminium oxyde ( Al ₂ O ₃) ikora nk'imashanyarazi ( > 10 ⊃1; ⊃2; Ω ). Uru ruganda rukingira imitego yumuriro wa triboelectric hejuru, bigatera ibyago byinshi bya ESD hafi ya elegitoroniki ya wafer.

Q2: Ni gute igipfunsi kirwanya static gitandukanijwe nigitambaro cyuzuye?

.Igisubizo ​​ ​ ​Kurwanya anti-static (static dissipative) ( 10⁶ - 10 ⁹) biva amaraso buhoro buhoro kandi neza nta guturika.

Q3: Ese guhanagura kenshi hamwe na Isopropyl Alcool (IPA) byangiza ibintu birwanya anti-static?

Igisubizo: Oya. Bitandukanye nigihe gito cyo kurwanya anti-static spray, imyenda ikize burundu ntabwo yoza cyangwa ngo ihanagure hamwe na IPA cyangwa isuku yumuti.

Q4: Nigute uburemere bwibishishwa birwanya aluminiyumu bigira ingaruka kumikorere yubwiherero bwa AMR?

Igisubizo: Ubucucike buke bwa Aluminium ( 2.7g / cm³ ) bugabanya uburemere bwa robo muri rusange ugereranije n’ibyuma, bituma moteri ntoya, itanga ubushyuhe buke imbere mu musarani, kandi ikagera kuri 20% - 30%  ikora ya batiri hagati yizuba.

Q5: Ni ubuhe buryo bwo gushingiraho busabwa kugira ngo imikorere ya anti-static ikorwe neza?

Igisubizo: Ipitingi itwara igomba guhuzwa n'amashanyarazi na chassis ya aluminiyumu hifashishijwe ingingo zidahinduka. Chassis ihita ihuza isi binyuze mumashanyarazi ya ESD itekanye cyangwa amashanyarazi akomeza gukoraho hasi ya fab ya ESD.

Umwanzuro

Anti-static isize ibishishwa bya aluminiyumu byerekana ibyangombwa byubwubatsi busabwa kugirango robot igenzure isuku ya semiconductor isuku, itanga umutekano wuzuye wa ESD, zeru zeru, kurwanya imiti myinshi, hamwe no kurinda imiterere yoroheje.

Kugirango uhindure ibikoresho byo guhitamo ibikoresho bya robot isukuye:

Kugaragaza Imiterere Ihindagurika (10⁶ - 10⁹  Ω / sq): Gutegeka nano-ikora fluoropolymer cyangwa ifu yipimishije yapimwe kuri ANSI / ESD S20.20 na ASTM D257.

Hitamo 5052-H32 cyangwa 6061-T6 Aluminiyumu ya Aluminium: Koresha 5052-H32 kuri panneaux igoramye yo hanze isaba guhinduka cyane, hanyuma ubike 6061-T6 kububiko bwa chassis yubatswe hamwe namakadiri yimbere.

Shimangira imiti igabanya ubukana & Outgassing Igenzura: Menya neza ko abatanga ibicuruzwa bagenzura niba barwanya 200+ IPA yahanaguwe kandi bagatanga NASA SP-R-0022A yemewe na raporo zemewe (TML <0.1%, CVCM <0.01%).